Dissertation Otmar Ertl

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D I S S E R T A T I O N

Numerical Methods for
Topography Simulation

ausgeführt zum Zwecke der Erlangung des akademischen Grades
eines Doktors der technischen Wissenschaften

eingereicht an der Technischen Universität Wien
Fakultät für Elektrotechnik und Informationstechnik
von

Otmar Ertl

Reinprechtsdorfer Straße 20/16
A-1050 Wien, Österreich

Matrikelnummer 0026810
geboren am 22. Februar 1982 in Vöcklabruck

Wien, im Mai 2010

Kurzfassung
Abstract
Acknowledgement
Contents
List of Figures
List of Tables
List of Algorithms
List of Abbreviations
List of Symbols
1. Introduction
- 1.1 Semiconductor Process Technology
- 1.2 Technology Computer-Aided Design
- 1.3 Motivation
- 1.4 Outline of the Thesis
2. Process Modeling
- 2.1 Continuum Approach
- 2.2 Transport Kinetics
- 2.3 Surface Kinetics
3. Surface Evolution
- 3.1 Boundary Evolution Techniques
- 3.2 Solving the Level Set Equation
- 3.3 Approximations to Geometric Variables
  - 3.3.1 Surface Normal
  - 3.3.2 Curvature
- 3.4 Acceleration Techniques
  - 3.4.1 The Narrow Band Method
  - 3.4.2 The Sparse Field Method
- 3.5 Level Set Data Structures
4. A Fast Level Set Framework
- 4.1 Initialization
  - 4.1.1 Closest Point Transformation
  - 4.1.2 H-RLE Data Structure Setup
- 4.2 Sequential Data Access
  - 4.2.1 Basic Iterator
  - 4.2.2 Offset Iterator
- 4.3 Sparse Field Implementation
- 4.4 Boolean Operations
- 4.5 Smoothing
- 4.6 Multiple Material Regions
- 4.7 Directional Visibility Check
  - 4.7.1 Directional Etching
  - 4.7.2 Simple Bosch Process Simulation
- 4.8 Void Detection
- 4.9 Surface Extraction
- 4.10 Parallelization
5. Surface Rate Calculation
- 5.1 Conventional Approach
  - 5.1.1 Algorithmic Complexity
  - 5.1.2 Limitations
- 5.2 Ray Tracing
- 5.3 Generation of Random Vectors
- 5.4 Implementation Details
  - 5.4.1 Simulation Flow
  - 5.4.2 Model Implementation
6. Applications
- 6.1 Chemical Vapor Deposition
- 6.2 Plasma Etching
- 6.3 Anisotropic Wet Etching
- 6.4 Bosch Process
  - 6.4.1 Process Time Variations
  - 6.4.2 Lag Effect
- 6.5 Focused Ion Beam Processing
7. Summary and Outlook
A. Line-Triangle Intersection
B. Ray-Isosurface Intersection
- B.1 Setup of the Polynomial
- B.2 Root Finding
C. Inequalities
Bibliography
List of Publications
Curriculum Vitae
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Next: Kurzfassung

Otmar Ertl: Numerical Methods for Topography Simulation