D I S S E R T A T I O N

Object-Oriented Algorithm and Model Management in TCAD Applications

ausgeführt zum Zwecke der Erlangung des akademischen Grades
eines Doktors der technischen Wissenschaften

eingereicht an der Technischen Universität Wien
Fakultät für Elektrotechnik
von

Robert Mlekus

Schulgasse 30
3424 Zeiselmauer
Matrikelnummer 8725237
geboren am 14. Juli 1968 in Tulln

Wien, im November 1999

• Kurzfassung
• Abstract
• Acknowledgment
• Contents
• List of Figures
• List of Tables
• List of MDL Examples
• 1. Introduction
  • 1.1 Outline of the Thesis
  • 1.2 Typography
  • 1.3 Terminology
  • 1.4 Abbreviations
• 2. The Algorithm Library
  • 2.1 Object-Oriented Programming
  • 2.2 Design of the Algorithm Library
  • 2.3 Structures of the Algorithm Library
    • 2.3.1 Parameter Structure
      • 2.3.1.1 Definition of MDL Parameter Types
      • 2.3.1.2 Parameter Linkage Mechanism
      • 2.3.1.3 Default Value Management
    • 2.3.2 Model Structure
    • 2.3.3 Model Instances
    • 2.3.4 Interface Structure
    • 2.3.5 MDL Functions
  • 2.4 Definition of Model Classes in C++
  • 2.5 Definition of Model Classes in MDL
  • 2.6 Program Flow
  • 2.7 The C++ Programmer Interface
  • 2.8 The CASE Tool Interface
• 3. The Model Definition Language
  • 3.1 Basic Facilities
    • 3.1.1 Keywords
    • 3.1.2 MDL Files
    • 3.1.3 Comments
    • 3.1.4 Environment Variables
    • 3.1.5 Include Files
    • 3.1.6 Dynamic Loading of Model Extension Libraries
    • 3.1.7 Parameters and Values
      • 3.1.7.1 Global Parameters
      • 3.1.7.2 Literals
      • 3.1.7.3 Type Conversions
    • 3.1.8 Operators
    • 3.1.9 Functions
    • 3.1.10 Controlling the Program Flow
      • 3.1.10.1 Conditional Expressions
      • 3.1.10.2 Loop Expressions
      • 3.1.10.3 The break Statement
      • 3.1.10.4 The continue Statement
  • 3.2 MDL Classes
    • 3.2.1 Interface Parameters
    • 3.2.2 Local Parameters
    • 3.2.3 Static Parameters
    • 3.2.4 Methods
      • 3.2.4.1 The return Statement
    • 3.2.5 Sub-Model Classes
      • 3.2.5.1 Example for Using Sub-ModelClasses
    • 3.2.6 Linkage of MDL Class Parameters
    • 3.2.7 Derived MDL Classes
    • 3.2.8 Aliased MDL Classes
  • 3.3 MDL Instance Selection
  • 3.4 Specifying Default Values for MDL Class Instances
  • 3.5 Linkage of MDL Class Instances
  • 3.6 Prefixing Model Class Names for MDL Input Decks
  • 3.7 Immediate MDL Class Instantiation and Evaluation
  • 3.8 Compiling MDL Classes
  • 3.9 Deleting MDL Definitions
  • 3.10 Accessing the Model and Parameter Information
  • 3.11 Error Recovery
• 4. PROMIS-NT
  • 4.1 Features of PROMIS-NT
  • 4.2 Supported Model Structures
    • 4.2.1 Volume Models
    • 4.2.2 Boundary Models
      • 4.2.2.1 Boundary Flux Equation System
      • 4.2.2.2 Dirichlet Type Boundary Conditions
    • 4.2.3 Process Temperature Modeling
  • 4.3 Quantity Management and VISTA Integration
    • 4.3.1 Charge States
    • 4.3.2 The PROMIS-NT Unit System
  • 4.4 The Structure of PROMIS-NT
  • 4.5 The PROMIS-NT Input Deck
    • 4.5.1 Logical Structure of the PROMIS-NT Input Deck
    • 4.5.2 PROMIS-NT Process Flow
    • 4.5.3 PROMIS-NT Model Classes
      • 4.5.3.1 General Setup
      • 4.5.3.2 Specification of Quantities
      • 4.5.3.3 Definition of Charge States
      • 4.5.3.4 Definition of Simulation Grids
      • 4.5.3.5 Model Selection
      • 4.5.3.6 Additional Device Setup and Post Processing
      • 4.5.3.7 Device Setup
      • 4.5.3.8 Coefficient Setup
      • 4.5.3.9 Boundary Coefficient Setup
      • 4.5.3.10 Segment Preprocessing Setup (Starting Conditions)
      • 4.5.3.11 Segment Postprocessing Setup
      • 4.5.3.12 Quantity Initialization and Post Processing
      • 4.5.3.13 Coefficients for Segment Models
      • 4.5.3.14 Coefficients for Boundary Models
• 5. PROMIS-NT Application Examples
  • 5.1 Analytical Implantation Simulation
  • 5.2 Five Species Phosphorus Pair-Diffusion Model
  • 5.3 Performance Considerations
• 6. Further Applications of the Algorithm Library
  • 6.1 MINIMOS-NT
  • 6.2 Levenberg-Marquardt Optimizer
  • 6.3 Amigos
• 7. Future Developments
• A. A Tiny Algorithm Library Application Example
  • A.1. VMAKE Project Definition
  • A.2. Application Body
  • A.3. MDL Function Definition
  • A.4. Parameter Definition
  • A.5. Model Definition
  • A.6. MDL Input Deck
• B. Additional MDL Functions
• C. Just in Time Compilation
• D. Coupling to TMA Suprem-4
• Bibliography
• Curriculum Vitae