5.3 Determination of the Parameter
Set for the Simulation
In the following section the geometrical setup and the transport models
described above will be used. The epitaxial and geometrical structure of
a HEMT is described in Chapter 2. It represents
the nominal device design. However, the structure of the actual device
after the process is known only with a certain accuracy. The impact of
the deviations of parameters from the nominal values on the device performance
has to be identified in order to determine the most critical parameters
for the simulation. Then the fitting procedure to find a suitable parameter
set for the geometry and the physical models will be described.
Next: 5.3.1 Identification of the Most
Critical Parameters Up: 5 Simulation
Previous: 5.2 Determination of the Transport Models
Helmut Brech 1998-03-11