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List of Abbreviations and Acronyms

BTE ... BOLTZMANN's transport equation
BZ ... Brillouin zone
CMOS ... Complementary MOS
CV ... Capacitance-voltage
DIBL ... Drain-induced barrier lowering
nMOS ... n-type MOS
pMOS ... p-type MOS
EUV ... Extreme ultra violet
FET ... Field-effect transistor
GIDL ... Gate induced drain leakage
HOT ... Hybrid orientation technology
ITRS ... International technology roadmap for semiconductors
LOCOS ... Local oxidation of Si
MOS ... Metal-oxide-semiconductor
MOSFET ... MOS field-effect transistor
PIF ... Profile interchange format
RTA ... Relaxation-time approximation
SGOI ... SiGe on insulator
SIMOX ... Separation-by-implanted-oxygen
SMT ... Stress memorization technique
SOI ... Si on insulator

SSDOI ... Strained Si directly on insulator
SSGOI ... Strained Si on SiGe on insulator
SSOS ... Strained Si on Si
STI ... Shallow trench isolation
TCAD ... Technology computer-aided design
UTB ... Ultra-thin-body
VLSI ... Very large scale integration


next up previous contents
Next: List of Symbols Up: Dissertation Siddhartha Dhar Previous: Contents

S. Dhar: Analytical Mobility Modeling for Strained Silicon-Based Devices