4.8.6 Isotropic Etching

Another application of the void detection algorithm is perfect isotropic etching applied to structures with voids. The surface is only advanced at locations, where it is connected to the source. As an example, isotropic etching of a “Swiss cheese”-like structure has been simulated. Figure 4.19 shows the initial geometry and the evolution over time. The etch rate is assumed to be 1 grid spacing per time unit.

Figure: 4.19 Isotropic etching of a “Swiss cheese“-structure with a constant etch rate of 1 grid spacing per time unit. (a) Initial geometry. (b)-(g) Illustration of the time evolution of the corresponding zero LS.