Next: List of Symbols
Up: Dissertation Otmar Ertl
Previous: List of Algorithms
- BTRM
- ballistic transport and reaction model
- CFL
- Courant-Friedrichs-Lewy
- CMP
- chemical-mechanical planarization
- CPU
- central processing unit
- CVD
- chemical vapor deposition
- DC
- direct current
- DTG
- dynamic tubular grid
- EVRM
- equi-volume rate model
- FIB
- focused ion beam
- FWHM
- full width at half maximum
- H-RLE
- hierarchical run-length encoded
- IC
- integrated circuit
- KOH
- potassium hydroxide
- LS
- level set
- MC
- Monte Carlo
- MEMS
- microelectromechanical systems
- OM
- object median
- PVD
- physical vapor deposition
- RF
- radio frequency
- RLE
- run-length encoded
- SAH
- surface area heuristic
- SM
- spatial median
- STL
- standard template library
- TCAD
- technology computer-aided design
- TEOS
- tetraethyl orthosilicate
Next: List of Symbols
Up: Dissertation Otmar Ertl
Previous: List of Algorithms
Otmar Ertl: Numerical Methods for Topography Simulation