Eigene Publikationen

1

S. HALAMA, F. FASCHING, C. FISCHER, H. KOSINA, E. LEITNER, CH. PICHLER, H. PIMINGSTORFER, H. PUCHNER, G. RIEGER, G. SCHROM, T. SIMLINGER, M. STIFTINGER, H. STIPPEL, E. STRASSER, W. TUPPA, K. WIMMER, AND S. SELBERHERR.
The Viennese Integrated System for Technology CAD Applications.
In Proceedings: Technology CAD Systems, Wien, 1993, Ed. by F. FASCHING, S. HALAMA, AND S. SELBERHERR, Springer, pp. 197-236.

2

S. HALAMA, F. FASCHING, C. FISCHER, H. KOSINA, E. LEITNER, P. LINDORFER, CH. PICHLER, H. PIMINGSTORFER, H. PUCHNER, G. RIEGER, G. SCHROM, T. SIMLINGER, M. STIFTINGER, H. STIPPEL, E. STRASSER, W. TUPPA, K. WIMMER, AND S. SELBERHERR.
The Viennese Integrated System for Technology CAD Applications.
Microelectronics Journal, Vol. 26, No. 2/3, 1995, pp. 137-158.

3

E. LEITNER, W. BOHMAYR, P. FLEISCHMANN, E. STRASSER, AND S. SELBERHERR.
3D TCAD at TU Vienna.
In Proceedings: 3-Dimensional Process Simulation, Wien, 1995, Ed. by J. LORENZ, Springer, pp. 136-161.

4

E. LEITNER AND S. SELBERHERR.
Adaptive Tesselation for the Three-Dimensional Simulation of Doping Profiles.
In Proceedings: Fourth Int. Conf. on Solid-State and Integrated-Circuit Technology, Beijing, China, 1995, Ed. by G.L. BALDWIN, Z. LI, C.C. TSAI, AND J. ZHANG, pp. 610-612.

5

E. LEITNER AND S. SELBERHERR.
Simulation von thermischen Diffusionsprozessen in dreidimensionalen Halbleiterstrukturen.
In Proceedings: Grundlagen und Technologie Elektronischer Bauelemente, Grossarl, April 1995, Ed. by K. RIEDLING, Gesellschaft für Mikroelektronik, pp. 67-70.

6

E. LEITNER AND S. SELBERHERR.
Three-Dimensional Grid Adaptation Using a Mixed-Element Decomposition Method.
In Proceedings: Simulation of Semiconductor Devices and Processes, Wien, 1995, Vol. 6, Ed. by H. RYSSEL AND P. PICHLER, Springer, pp. 464-467.

7

M. RADI, E. LEITNER, E. HOLLENSTEINER, AND S. SELBERHERR.
AMIGOS: Analytical Model Interface & General Object-Oriented Solver.
In Proceedings: Basics and Technology of Electronic Devices, Grossarl, Austria, March 1997, Ed. by K. RIEDLING, Gesellschaft für Mikroelektronik, pp. 57-60.
Proc. of the Seminar ``Grundlagen und Technologie Elektronischer Bauelemente''.

8

M. RADI, E. LEITNER, E. HOLLENSTEINER, AND S. SELBERHERR.
AMIGOS: Analytical Model Interface & General Object-Oriented Solver.
In Proceedings: International Conference on Simulation of Semiconductor Processes and Devices, Cambridge, Massachusetts, 1997, pp. 331-334.

9

M. RADI, E. LEITNER, E. HOLLENSTEINER, AND S. SELBERHERR.
Analytical Partial Differential Equation Modeling Using AMIGOS.
In: Proc. IASTED International Conference Artificial Intelligence and Soft Computing, Banff, Canada, July 1997, pp. 423-426.

10

H. STIPPEL, E. LEITNER, CH. PICHLER, H. PUCHNER, E. STRASSER, AND S. SELBERHERR.
Process Simulation for the 1990s.
Microelectronics Journal, Vol. 26, No. 2/3, 1995, pp. 203-215.

11

E. LEITNER, AND S. SELBERHERR.
Mixed-Element Decomposition Method for Three-Dimensional Grid Adaptation.
Submitted to IEEE Trans.Computer-Aided Design.

12

E. LEITNER, H. KIRCHAUER, S. SELBERHERR, H. PUCHNER, AND S. ARONOWITZ.
Simulation of {311} Defect Behavior and the Impact on Phosphorus Diffusion.
Submitted to IEEE Trans.Electron Devices.