The following chapters present more details about the integration of analysis and optimization tools in a simulation environment for semiconductor devices.
In Chapter 2 the underlying concepts of a usable simulation environment and some optimization scenarios are presented. Chapter 3 focuses on statistical analysis using Design of Experiments and Response Surface Methodology. Chapter 4 deals with optimization methods and their integration in a simulation environment. In Chapter 5 some optimization examples are presented.
Finally, this thesis concludes with a brief discussion and gives some suggestions for future work.