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List of Acronyms

CAD Computer Aided Design
CASE Computer Aided Software Engineering
CMOS Complementary MOS
DoE Design of Experiments
DMOS Double-diffused Metal Oxide Semiconductor
FET Field Effect Transistor
GUI Graphical User Interface
HBT Heterojunction Bipolar Transistor
LDD Lightly Doped Drain
MOS Metal Oxide Semiconductor
MOSFET MOS Field Effect Transistor
NMOS N-channel MOS
PIF Profile Interchange Format
PMOS P-channel MOS
RSM Response Surface Methodology
SIESTA Simulation Environment for Semiconductor Technology Analysis
SIMS Secondary Ion Mass Spectroscopy
TCAD Technology Computer Aided Design
VDMOS Vertical Double-diffused Metal Oxide Semiconductor
VISTA Vienna Integrated System for TCAD Applications
VLSI Very Large Scale Integration


next up previous contents
Next: 1. Introduction Up: Dissertation Previous: Contents

R. Plasun