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C. Estimating the Total Charge in the Diffusive Layer
The Poisson-Boltzmann equation can be solved for the total charge in the diffusive layer in a similar manner the way it is done for the semiconductor surface potential. Beginning with (5.13):
|
(7.21) |
Reexpressing it via the Debye length,
|
(7.22) |
leads to the following expression:
|
(7.23) |
This equation can be rewritten by applying the following identity:
|
(7.24) |
Substituting (7.24) into (7.23) leads to a first order differential euqation:
|
(7.25) |
(7.25) can be solved via separation of variables. Under the condition of a vanishing electric field for
the following solution can be derived:
|
(7.26) |
Exploiting the identity
, the expression for
can be formulated as:
|
(7.27) |
In the last calculation step Gauß's law is utilized to express the total charge per unit area in the Gouy-Chapman layer:
|
(7.28) |
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T. Windbacher: Engineering Gate Stacks for Field-Effect Transistors