Publications

@inproceedings{stella2024prime,

title = {Atomistic Study of 4H-SiC Using Ab Initio and Machine Learning Techniques (invited)},

author = {Robert Stella and Sabine Leroch and Andreas Hössinger and Lado Filipovic},

year  = {2024},

date = {2024-10-01},

booktitle = {Joint International Meeting of The Electrochemical Society (ECS), The Electrochemical Society of Japan (ECSJ), and The Korean Electrochemical Society (KECS) - PRiME 2024},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2024efficient,

title = {Efficient Multi-Scale Modeling of Semiconductor Device Fabrication (invited)},

author = {Lado Filipovic},

year  = {2024},

date = {2024-01-01},

booktitle = {Proceedings of the 5th International Congress on Advanced Materials Sciences and Engineering (AMSE)},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2024semiconductor,

title = {Semiconductor Fabrication at Multiple Time and Length Scales (invited)},

author = {Lado Filipovic},

year  = {2024},

date = {2024-01-01},

booktitle = {Proceedings of Austrochip - Workshop on Microelectronics},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2024modelingALD,

title = {Modeling and Simulation of ALD in a Level Set Framework (invited)},

author = {Lado Filipovic},

year  = {2024},

date = {2024-01-01},

booktitle = {Proceedings of the 7th International Conference ALD for Industry},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2024merging,

title = {Merging Reactor and Feature Scales for Plasma Etch Modeling (invited)},

author = {Lado Filipovic},

year  = {2024},

date = {2024-01-01},

booktitle = {Proceedings of IEEE Nanotechnology Council - IEEE NANO 2024},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2024multiscale,

title = {Multi-Scale Process TCAD for Advanced Semiconductor Fabrication},

author = {Lado Filipovic and Balazs Bamer and Sabine Leroch and Tobias Reiter and Robert Stella and Andreas Hössinger},

year  = {2024},

date = {2024-01-01},

urldate = {2024-01-01},

booktitle = {Book of Abstracts MESS24 - Microelectronic Systems Symposium},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{bamer2024cluster,

title = {Cluster-Based Model for Dopant Activation in SiC},

author = {Balazs Bamer and Andreas Hössinger and Lado Filipovic},

year  = {2024},

date = {2024-01-01},

urldate = {2024-01-01},

booktitle = {Book of Abstracts MESS24 - Microelectronic Systems Symposium},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2024plasmatech,

title = {Multi-Scale Model for High Aspect Ratio TiN Etching in a Cl$_2$/Ar Inductively Coupled Plasma},

author = {Lado Filipovic and Tobias Reiter},

year  = {2024},

date = {2024-01-01},

booktitle = {Proceedings of the Plasma Processing and Technology International Conference (PlasmaTech)},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2024spline,

title = {Spline Interpolation-Based Multi-Scale Model for Etching in a Chlorine-Argon Inductively Coupled Plasma},

author = {Lado Filipovic and Tobias Reiter},

year  = {2024},

date = {2024-01-01},

booktitle = {Proceedings of the 20th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM)},

note = {Part of Winter Simulation Conference (WSC)},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{hu2024modeling,

title = {Modeling Non-Uniformity During Two-Step Dry Etching of Si/SiGe Stacks for Gate-All-Around FETs},

author = {Ziyi Hu and Lado Filipovic and Junjie Li and Lingfei Wang and Zhicheng Wu and Rui Chen and Yayi Wei and Ling Li},

year  = {2024},

date = {2024-01-01},

booktitle = {2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{leroch2024md,

title = {MD Simulation of Epitaxial Recrystallization and Defect Structure of Al-Implanted 4H-SiC},

author = {Sabine Leroch and Robert Stella and Andreas Hössinger and Lado Filipovic},

year  = {2024},

date = {2024-01-01},

booktitle = {2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2024equipment,

title = {Equipment-Informed Machine Learning-Assisted Feature-Scale Plasma Etching Model},

author = {Lado Filipovic and Tobias Reiter and Julius Piso and Roman Kostal},

year  = {2024},

date = {2024-01-01},

booktitle = {2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{reiter2024impact,

title = {Impact of Ion Energy and Yield in Oblique Ion Beam Etching Process for Blazed Gratings},

author = {T. Reiter and A. Toifl and S. W. Kong and A. Hössinger and Lado Filipovic},

year  = {2024},

date = {2024-01-01},

booktitle = {2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{bamer2024clusterAMASIS,

title = {Cluster-Based Multivariate Spline Model for Dopant Activation in SiC},

author = {Balazs Bamer and Andreas Hössinger and Lado Filipovic},

year  = {2024},

date = {2024-01-01},

urldate = {2024-01-01},

booktitle = {Book of Abstracts AMaSiS 2024 - Applied Mathematics and Simulation for Semiconductor Devices},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2023electromigration,

title = {Electromigration Reliability of Buried Power Rails in Vertically Stacked Devices},

author = {Lado Filipovic and Roberto Lacerda Orio},

doi = {10.1109/iirw59383.2023.10477689},

year  = {2023},

date = {2023-10-01},

booktitle = {2023 IEEE International Integrated Reliability Workshop (IIRW)},

publisher = {IEEE},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{reiter2023modeling,

title = {Modeling Oxide Regrowth During Selective Etching in Vertical 3D NAND Structures},

author = {T. Reiter and A. Toifl and A. Hössinger and L. Filipovic},

doi = {10.23919/sispad57422.2023.10319506},

year  = {2023},

date = {2023-09-01},

booktitle = {2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

publisher = {IEEE},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{leroch2023molecular,

title = {Molecular Dynamics Study of Al Implantation in 4H-SiC},

author = {Sabine Leroch and Robert Stella and Andreas Hössinger and Lado Filipovic},

doi = {10.23919/sispad57422.2023.10319554},

year  = {2023},

date = {2023-09-01},

booktitle = {2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

publisher = {IEEE},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2023physics,

title = {Physics-Informed Compact Model for SF$_6$/O$_2$ Plasma Etching},

author = {Lado Filipovic and Josip Bobinac and Julius Piso and Tobias Reiter},

doi = {10.23919/sispad57422.2023.10319479},

year  = {2023},

date = {2023-09-01},

booktitle = {2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

publisher = {IEEE},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{reiter2023fast,

title = {Fast 3D Flux Calculation Using Monte Carlo Ray Tracing on GPUs},

author = {Tobias Reiter and Lado Filipovic},

doi = {10.13140/RG.2.2.13265.71524},

year  = {2023},

date = {2023-01-01},

booktitle = {Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT '2023)},

pages = {67--72},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2023process,

title = {Process Simulation in Micro- And Nano-Electronics (invited)},

author = {L. Filipovic and T. Reiter and X. Klemenschits and S. Leroch and R. Stella and O. Baumgartner and A. Hössinger},

year  = {2023},

date = {2023-01-01},

booktitle = {Book of abstracts of the International Workshop on Computational Nanotechnology},

pages = {38--39},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}