The CDL₄ProMod has entered a collaboration with the globally-renowned Michigan Institute of Plasma Science and Engineering (MIPSE), led by Prof. Mark Kushner at the University of Michigan. With this collaboration, we aim to use the Hybrid Plasma Equipment Model (HPEM) developed by Prof. Kushner to create surrogate models for process TCAD using interpolation and machine learning approaches.
As part of the collaboration, the director of the CDL₄ProMod gave a seminar at the University of Michigan on Multi-Scale Process TCAD at the Institute for Microelectronics, TU Wien. For more information, see https://mipse.umich.edu/seminars_2425.php