The CDL₄ProMod has entered a collaboration with the globally-renowned Michigan Institute of Plasma Science and Engineering (MIPSE), led by Prof. Mark Kushner at the University of Michigan. With this collaboration, we aim to use the Hybrid Plasma Equipment Model (HPEM) developed by Prof. Kushner to create surrogate models for process TCAD using interpolation and machine…
Archives: News
ViennaPS on Python package indexer
We are proud to announce that our open source in-house process TCAD tool, ViennaPS is now available in the python package manager. After many months of hard work, the tool can now be easily downloaded and installed using “pip install ViennaPS”.
CDL₄ProMod once again at SISPAD
The 2024 SISPAD conference will have 5 oral contributions from the CDL₄ProMod:
CDL₄ProMod at the Winter Simulation Conference
With increasing importance being placed on semiconductor fabrication processes and equipment, the CDL₄ProMod will participate in the International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) which is part of the Winter Simulation Conference (WSC) in Orlando, Florida. Our accepted contribution will discuss how we are using interpolation, optimization, and machine learning approaches to…
New collaboration with MIT
CDL₄ProMod has entered a collaboration with the Massachusetts Institute of Technology (MIT) on the development and fabrication of diamond wave guides. ViennaPS will be used, together with finite difference time domain (FDTD) simulatoins in order to optimize the waveguide geometry.
ALD paper accepted for publication in SSE
Our invited submission to the Solid-State Electronics journal Reiter, Tobias, et al. “Modeling the impact of incomplete conformality during atomic layer processing.” Solid-State Electronics 211 (2024): 108816. has been accepted for publication! This work explores means to model atomic layer processing in high aspect ratio (HAR) structure,s when ideal conformality cannot be guaranteed.
Crystals journal accepted
A journal has been accepted, where we study Si/SiGe devices at cryogenic temperatures. Garcia-Barrientos, Abel, et al. “Numerical Simulations of Space Charge Waves Amplification Using Negative Differential Conductance in Strained Si/SiGe at 4.2 K.” Crystals 13.9 (2023): 1398. Having the ability to model complex heterostructures is one step in the DTCO cycle. Once an optimized…
Two journals accepted!
Two journals which explore novel materials have been published: In 1, we explore materials for advanced and future technology nodes. In essence, we want to find out how 2D materials, such as antimonene, reacts to induced strain. This work is a part of a pathfinding approach, where TCAD is used to assess the feasibility of…
CDL₄ProMod at IWCN
The director of the CDL₄ProMod, Lado Filipovic, gave a invited talk at the International Workshop on Computational Nanotechnology in Barcelona, Spain. The talk centered around how we are providing meaningful integration of process TCAD and structure generation in the design cycle of semiconductor devices and circuits.
Three accepted contributions to SISPAD 2023
We are very proud to announce that all three CDL4ProMod submissions to this year’s SISPAD in Kobe, Japan, have been accepted. This year’s acceptance rate was below 50%, which is much lower than in the past years. The paper titles and authors are as follows: Congratulations to everyone involved!