CDL₄ProMod at the Winter Simulation Conference

With increasing importance being placed on semiconductor fabrication processes and equipment, the CDL₄ProMod will participate in the International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) which is part of the Winter Simulation Conference (WSC) in Orlando, Florida. Our accepted contribution will discuss how we are using interpolation, optimization, and machine learning approaches to link process TCAD to equipment settings.