Process Optimisation in Multiple Dimensions for Semiconductor Technology II

The PROMPT-2 project aims at three main goals: First, based on the background results from PROMPT accurate, general, and efficient three-dimensional process simulation modules will be developed for the most important process steps in silicon technology, and integrated into the multi-dimensional PROMPT program system. Second, a set of advanced physical models will be implemented to allow for predictive simulation with the multi-dimensional software. These modeling activities will, as far as possible, build upon results obtained in the ADEQUAT projects. Third, the software system will be extended to address not only CMOS but also BiCMOS and EEPROM technologies.

Activities in PROMPT-2 are planned  to be carried out in close cooperation with technology projects. Development of the next generation of software tools or major activities on the development of predictive models are not included in any known joint European effort. Concerning the implementation of advanced physical models, PROMPT-2 will additionally benefit from external efforts of those of the PROMPT-2 partners which are Centers-of-Excellence in model development.