Process Optimisation in Multiple Dimensions for Semiconductor Technology

The aim of the PROMPT project was the development of an engineering program system suitable to provide appropriate input (topography, doping) for three-dimensional device simulation.

The main tasks for the development of a multi-dimensional process simulation system were:

• the compilation of three-dimensional profiles from one-dimensional, two-dimensional, and three-dimensional process simulation.

• the use of existing one-dimensional and two-dimensional programs.

• the development of new three-dimensional simulation modules.