2.3.3.5 Commercially Available Epilayers

There are a number of groups worldwide that grow high-quality epitaxial layers; of these, the most known that offer a commercial SiC CVD epitaxial material with good thickness uniformity are Cree Inc. [65], Dow Corning [66], II-VI Inc. [67], Okmetic [68] and SemiSouth Laboratories [69]. Several other groups such as Northrop Grumman [70] in the U.S. and Infineon Technologies [71] in Germany, possess commercial-quality epitaxy as a captive internal source.

T. Ayalew: SiC Semiconductor Devices Technology, Modeling, and Simulation