There are a number of groups worldwide that grow high-quality epitaxial layers; of these, the
most known that offer a commercial SiC CVD epitaxial material with good thickness uniformity
are Cree Inc. [65], Dow Corning [66], II-VI Inc. [67],
Okmetic [68] and SemiSouth Laboratories [69]. Several other groups such
as Northrop Grumman [70] in the U.S. and Infineon Technologies [71] in
Germany, possess commercial-quality epitaxy as a captive internal source.