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Previous: 1.1.3 TIF Up: 1.1 Existing Data Models Next: 1.1.5 SWR Semiconductor Wafer Representation |
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Previous: 1.1.3 TIF Up: 1.1 Existing Data Models Next: 1.1.5 SWR Semiconductor Wafer Representation |
The Silvaco [16] TCAD suite consists of the process simulation module ATHENA [17] and the device simulation module ATLAS [18]. ATHENA is limited to the simulation of two-dimensional processes. Data exchange is also performed via a file.
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Previous: 1.1.3 TIF Up: 1.1 Existing Data Models Next: 1.1.5 SWR Semiconductor Wafer Representation |