5.6 Examples

In this section three examples of optimization tasks are given. First, a comparison of the presented local and global optimization strategies is presented. A sample task -- the inverse modeling of the doping concentration of a MOS transistor -- was performed with three of the available optimizers.

In the second example a combination of the local, gradient based optimizer with the global very fast simulated re-annealing algorithm will be shown.

Finally, an industrial application, the automated calibration of parameters of the process simulator TSUPREM-IV to experimental data is presented. In the example a model to simulate cluster formation and dissolution in Silicon is calibrated.

Subsections

• 5.6.1 Comparison of Local and Global Optimization Strategies
  • Local Optimizer
  • Genetic Optimizer
  • Simulated Annealing Optimizer
  
  
• 5.6.2 Combination of Local and Global Optimization Strategies
  • 5.6.2.1 Optimizer Protocol
  • 5.6.2.2 Optimizer Interaction
  • 5.6.2.3 Results
  
  
• 5.6.3 Calibration of a Model for Silicon Self-Interstitial Cluster Formation and
  Dissolution
  • 5.6.3.1 The Model for Cluster Formation and Dissolution
  • 5.6.3.2 Calibration Task

2003-03-27