2 TCAD System Data Analysis

Since TCAD systems are used for engineering semiconductor devices and processes, the data used is mainly related to cross-sectional (vertical) wafer design, be it in one, two, or three dimensions. However, future developments point in the direction of integrating TCAD systems with CAD systems in the EDA (Electronic Design Automation) domain. Therefore in the following we will concentrate on the genuine purpose of TCAD systems with respect to TCAD data, but keep in mind that the option of establishing links to EDA tools is an important design issue of TCAD frameworks.

• 2.1 General Principles
  • 2.1.1 Tool Integration
  • 2.1.2 Data Flows
• 2.2 TCAD Users and Tasks
• 2.3 Tool Data
• 2.4 Task and Framework Data
  • 2.4.1 Tool Coupling
  • 2.4.2 Framework Internal Data
• 2.5 Representational Aspects
• 2.6 Summary