The previously discussed epsilon criterion in addition to the demonstrated full recovery after each stress pulse enables back extrapolation to the very beginning of the relaxation phase of the fast pulsed -method. For this method and the fast- method are compared including different voltages and temperatures. It has to be mentioned that the temperature dependence of was not exactly measured, and hence is missing for the precise extraction and that in addition mobility changes with temperature have been neglected. However, the results shown in Fig. 6.19 still show good qualitative agreement of both measurement techniques.