An important point has not yet been discussed so far. When investigating short pulsed BTI measurements such as FPM, the time-resolution of the measurement equipment is of utmost importance. To determine the limits of the used setup, a short - and a very short -pulse mode2 are compared for NBTI in Fig. 5.11. Not surprising, the extracted values using the -pulses are smoother than those using the -pulses. This is due to the best signal-to-noise ratio of all four performed FPM (NBTI/PBTI using /), previously depicted in Fig. 5.5 and Fig. 5.6.