An important point has not yet been discussed so far. When investigating
short pulsed BTI measurements such as FPM, the time-resolution of
the measurement equipment is of utmost importance. To determine the
limits of the used setup, a short - and a very short
-pulse
mode2
are compared for NBTI in Fig. 5.11. Not surprising, the extracted values
using the
-pulses are smoother than those using the
-pulses.
This is due to the best signal-to-noise ratio of all four performed FPM
(NBTI/PBTI using
/
), previously depicted in Fig. 5.5 and
Fig. 5.6.