To compare stress and relaxation properly, the initial charge pumping signal should stay constant over the whole considered low level gate voltage -region. Hence, under the assumption that only interface states contribute, should actually become independent of as soon as the strong inversion regime is reached. This is marked by the dashed line in Fig. 5.13. However, as demonstrated previously [44, 43], continues to increase, albeit at a much slower rate. This increase with is routinely attributed to slower oxide traps and [47, 97]. So, regardless of the amount of degradation, varies as function of . This fact has to be taken into account for a meaningful comparison of stress and relaxation CP data.