To compare stress and relaxation properly, the initial charge pumping signal
should stay constant over the whole considered low level gate voltage
-region. Hence, under the assumption that only interface states contribute,
should actually become independent of
as soon as the strong
inversion regime is reached. This
is marked by the dashed line in
Fig. 5.13. However, as demonstrated previously [44, 43],
continues to
increase, albeit at a much slower rate. This increase with
is routinely
attributed to slower oxide traps
and
[47, 97]. So,
regardless of the amount of degradation,
varies as function of
. This
fact has to be taken into account for a meaningful comparison of stress and
relaxation CP data.