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2.6 Photoresist
Once the aerial image, i.e., the incident light intensity on top of the wafer,
is defined, it has to be transferred into the photoresist to generate
a replica of the mask directly on the wafer surface. The basic
categories into which photoresists can be divided is their polarity. A
positive photoresist responds to the light in such a way as to make
the exposed regions more soluble. A positive image of the mask is thereby stored.
A negative photoresist acts in the opposite way. As most negative
photoresists rely on photoinduced cross polymerization, a process in which
large resin molecules attach to each other to become less soluble, they suffer
of ``swelling.'' Swelling limits the possible resolution due to linewidth
broadening during the development stage. For this reason negative resists are not
suited to define features less than 2.0 m. Hence,
primarily positive photoresists are used in IC fabrication.
Heinrich Kirchauer, Institute for Microelectronics, TU Vienna
1998-04-17