3.3 Modeling of Technology Innovations

To model technology innovations more advanced simulation methods are required to accurately cope with the involved highly sophisticated physical processes. The needed computational resources and, especially, the simulation time increase considerably restricting the application to a single or to a small number of features at most. Unfortunately, this situation counteracts the need for large simulation domains as particularly necessary for simulation of optical proximity correction. Hence, depending on the simulation task, either feature-size or die-size simulation approaches have to be chosen.