FIRST AND FOREMOST I want to thank Prof. SIEGFRIED SELBERHERR for giving me the opportunity to conduct my scientific work in parallel to my professional engagement in semiconductor industry. Furthermore, for providing the excellent infrastructure at the Institute for Microelectronics, and for the professional support and help in getting me to finalize my thesis.
I thank Prof. WOLFGANG PRIBYL, that he was willing to serve on my examination committee even on very short notice.
I am grateful to my boss MARTIN SCHREMS to help me with my thesis in a very supportive and positive manner. Furthermore, he provided a very innovative and interesting working environment.
I wish to thank all my co-authors for the very good and fruitful discussion on the contents of my publications.
I especially want to thank GEORG RÖHRER from austriamicrosystems AG, DIETER RATHEI from DR Yield, STEFAN HOLZER and ANDREAS HÖSSINGER from Institute for Microelectronics, TU Vienna and JÜRGEN LORENZ from the Fraunhofer Gesellschaft, IISB for their contributions to the examples in Chapter 6.
After all my wife CHRISTINE and my children CHRISTOPH and BENJAMIN provided me with love and understanding, especially when another weekend passes by, me sitting at the computer and working on my thesis. They carried me through the tough times last year, when the work seemed to be never ending.
Finally, none of my studies would have been possible without the continuous support of my parents.