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4.1 Introduction

After the general overview about the environments of semiconductor integrated circuit fabrication and the corresponding TCAD simulation environment, the following chapter deals with the structure and approach of the new concept. This concept is connecting both worlds in an automated way. Furthermore, the painstaking process of getting data from one world into another is dramatically reduced and the overall productivity of TCAD simulation is significantly improved.
The next section lays out the different interfaces between ``reality'' and ``simulation'' in a structured way. The basic information paths are identified and analyzed. This information is important to specify the border conditions for the different converters shown in the next chapter. In addition, a good picture of the different levels of information input into the simulation framework is given.


next up previous contents
Next: 4.2 Interfaces Up: 4. Integration between Semiconductor Previous: 4. Integration between Semiconductor

R. Minixhofer: Integrating Technology Simulation into the Semiconductor Manufacturing Environment