Without support of my colleagues and friends the creation of this work in this form would not have been possible. My thanks apply to all those who affected me positively during my work at the Institute for Microelectronics. First of all I like to express my thanks to Prof. Siegfried Selberherr and Prof. Erasmus Langer, who provided me with a perfect working environment. Their guidance and advise has been crucial for this work.
Especially I want to thank Prof. Herbert Haas. With his technical authority and experience in the numerical and analytical analysis of electromagnetic fields he helped me for the clear understanding of the theoretical part of this work.
Many thanks to Robert Bauer and Rainer Sabelka who created the basis for this work with their dissertations and their simulation software for resistance and capacitance extraction. I also extend my appreciation to Johann Cervenka and Hajdin Ceric for their ceaseless cooperation and for proofreading my thesis.
I owe gratitude to all my colleagues at the Institute for Microelectronics for the interesting discussions and their kind support.
And last but not least I want to thank my family and my relatives for supporting me during the whole time of my education.