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4.3.4 Calculation of the Mechanical Stress
The discretization of the mechanical problem presented in Section 4.2.4 yields the linear system of equations
|
(4.96) |
with
|
(4.97) |
|
(4.98) |
Since
,
, and
are constant within an element, the assembly of (4.96) is performed in FEDOS using
|
(4.99) |
and
|
(4.100) |
The mechanical problem has to be solved each time step after the solution of the vacancy dynamics problem, as shown in Figure 4.3.
Thus, for the time step , the internal force vector is determined by the electromigration induced strain given in (3.82), so that
|
(4.101) |
From (3.78), the trace of the electromigration strain for each node of the tetrahedron is calculated by
|
(4.102) |
resulting in the element strain which is set in (4.101),
|
(4.103) |
The solution of (4.96) yields the interconnect line deformation due to electromigration.
Once the displacement field
is determined, the electromigration induced stress vector for an element is obtained using (4.60),
|
(4.104) |
The mechanical stress at each node is obtained by an extrapolation from the stress calculated for the elements, given by (4.104). The stress at a particular node is calculated by performing a weighted average of the stress on all elements connected to the node. Considering a node
and defining the set of all elements which contain the node as , the mechanical stress at the node is given by
|
(4.105) |
where is the volume, and
is the stress calculated by (4.104) for the element .
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R. L. de Orio: Electromigration Modeling and Simulation