List of Abbreviations

IC Integrated Circuit
FEOLFront End Of the Line
BEOLBack End Of the Line
2DTwo-Dimensional
3DThree-Dimensional
MCM Multi-Chip Module
SOCSystem-On-Chip
SiPSystem-in Package
CSPChip-Scale Package
TSVThrough Silicon Via
CMOS Complementary Metal-Oxide-Semiconductor
DRIEDeep Reactive Ion Etching
CVDChemical Vapor Deposition
PVDPhysical Vapor Deposition
ECDElectro Chemical Deposition
CTE Coefficient of Thermal Expansion
DRAMDynamic Random-Access Memory
NANDNegative AND
DDR4Double Data Rate-4
MEMSMicroelectromechanical Systems
FEM Finite Element Method
FEAFinite Element Analysis
PDEPartial Differential Equation
4PBFour Point Bend
DRIEDeep Reactive Ion Etching
V-WVolmer-Weber