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Next: 2.2.2 Multistep Simulators Up: 2.2 TCAD Tools Previous: 2.2 TCAD Tools

2.2.1 Point Simulators

Point simulators focus on the accurate and sound modeling of single fabrication processing steps and are used primarily to analyze advanced effects. They do not intend to support process integration tasks, but to gain insight into the underlying physical mechanisms of treatments and processes.



Christoph Pichler
Thu Mar 13 14:30:47 MET 1997