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Index

vos::tool
4.6.1 Configuration
name=
8.3 EVE: Evaluable Entities
name
8.3 EVE: Evaluable Entities
define-control
8.3.1 Basic Functionality
set-control
8.3.1 Basic Functionality
set-control-expression
8.3.1 Basic Functionality
set-control-conversion
8.3.1 Basic Functionality
sequence
9.2.4 Task Definition
parallel
9.2.4 Task Definition
Agents
3.5.1 Encapsulation of External
Batch file
3.3.1 Task Control Layer
Batch-mode operation
6.7.3 Batch Mode Operation
Berkeley Process Flow Language
5.4.1 PFR for Manufacturing
Binding function
4.4.1 Binding Function
Binding functions
3.3.3 Tool Binding
BPFL
5.4.1 PFR for Manufacturing
CAD methodologies
1.1 Semiconductor Technology
Calibration
4.5 Simulator Calibration | 5.6.1 Mapping
Callback mechanism
B Callback Mechanism
Case sensitivity
8.3 EVE: Evaluable Entities
CFI
5.4.1 PFR for Manufacturing
Client side
8.3 EVE: Evaluable Entities
CMOS process
9.1 Standard CMOS Process
Color-coding
6.6.1 Color Coding
Computer-Integrated Manufacturing
1.1.2 CIM: Computer Integrated
Concurrent clients
3.5 Concurrent Clients
Concurrent engineering
10.5.2 Concurrent Design
Conditional execution
8.4.1 Flow EVE
Controls
8.3 EVE: Evaluable Entities
Design
3.4.1 VISTA/SFC Graphical User
Design space
8 Task Level TCAD
Detached operation
6.7.3 Batch Mode Operation
Electronic CAD
1.1.1 ECAD: Electronic Computer
Epsilon
6.2 Experimental Splits
Equipment step
5.3 OperationsSteps, and
Evaluable Entity
8.3 EVE: Evaluable Entities
EVE
8.3 EVE: Evaluable Entities
EVI
8.5 EVI: Evaluation Instances
Fabrication processes
5.1 Fabrication Process Steps
Feature size
5.3 OperationsSteps, and
File purging
7.1.2 Data Files
Fit error
8.8 Optimization and Calibration
Flow editor
3.3.2 Simulation Flow Control | 5.10 Graphical Flow Editor
Hosts
3.4.1 VISTA/SFC Graphical User
restricted
3.4.1 VISTA/SFC Graphical User
Information models
4.3 Data Level
Input deck template
4.4.3 Input Deck Templates
Input" deck
4.4.3 Input Deck Templates
Interface agents
3.3.3 Tool Binding
Internet
10.5.5 Internet Collaboration and
Layout
1.1.1 ECAD: Electronic Computer
Layout data
5.11 Layout Data
Libraries
5.7.4 Libraries
LISP
comment character
A LISPXLISP, and
function declaration
A LISPXLISP, and
nodes
A LISPXLISP, and
overview
A LISPXLISP, and
predicate" functions
A LISPXLISP, and
type information
A LISPXLISP, and
LISP expressions
encapsulation
8.4.5 LISP EVE
Load" balancing
3.4.1 VISTA/SFC Graphical User
Manufacture acceptance
2.1.8 Design Centering and
Matrix calibration
4.5 Simulator Calibration
Model parameters
1.1.1 ECAD: Electronic Computer
Modules
5.7.3 Modules
Monte Carlo method
2.1.8 Design Centering and
Non-positional parameter passing
5.9.1 File Format
NORMAN
5.9 Programming Interface
Operations
5.7.2 Operations
Optimization
global optimum
9.2.5 Optimization Result and
initial values
9.2.5 Optimization Result and
Orphaned run
7.2 Splitting and Data
Parameter selection
8.4.1 Flow EVE
Parameterized design
8.1 Design Parameterization and
PIF Application" Interface
3.3.1 Task Control Layer
Pifcopy
C Auxiliary PIF Tools
Pifmaid
C Auxiliary PIF Tools
Pifrm
C Auxiliary PIF Tools
Pifstat
C Auxiliary PIF Tools
Planar technology
5 Semiconductor Process Flow
Process flow
5.3 OperationsSteps, and
Process flow representation
5 Semiconductor Process Flow
Process operation
5 Semiconductor Process Flow
Process simulation tools
5.2 Process Simulation Tools
Process step
5.3 OperationsSteps, and
Profile Interchange Format
3.3.1 Task Control Layer
Project
3.4.1 VISTA/SFC Graphical User | 6.1 Projects
Proprietary procedures
5.4 Process Flow Representations
Recipe
5.3 OperationsSteps, and | 5.4 Process Flow Representations | 5.7.2 Operations
Resource
4.4.2 Tool Resources
boolean
4.4.2 Tool Resources
Resources
3.4.1 VISTA/SFC Graphical User
Responses
8.3 EVE: Evaluable Entities
Rework
6.5.4 Rework
RSM-EVE calibration
8.4.3 RSM EVE Calibration
Run controller
3.3.2 Simulation Flow Control
Run data base
3.3.2 Simulation Flow Control
Run traveler
5.3 OperationsSteps, and
Screening analysis
8.6 Design of Experiments
Semiconductor equations
1.1.3 TCAD: Technology Computer
Server side
8.3 EVE: Evaluable Entities
Short channel effect
5.11.1 Variational Masks | 9.2 Short Channel Effect
Simulation Flow Control
3.2.1 Simulation Tool Integration
Simulation stages
4 Integration of Simulation
Single-step operation
6.5.2 Single Step Operation
Socket
6.7.3 Batch Mode Operation
Split branch
6.2 Experimental Splits
Split parent
6.2 Experimental Splits | 7.2 Splitting and Data
Split point
6.2 Experimental Splits
Split-lot experiments
3.3.2 Simulation Flow Control
SPR
5.4.1 PFR for Manufacturing
Spread sheet
8.5 EVI: Evaluation Instances
Static calibration
4.5 Simulator Calibration
Steps
5.7.1 Steps
Stop and resume
6.5.3 Stop and Resume
Supplementary design
8.6 Design of Experiments
System jobs
3.4.1 VISTA/SFC Graphical User
System Tool Interface
4.6 System Tool Interface
Task
8 Task Level TCAD
Task control layer
3.3.1 Task Control Layer
Task level
8 Task Level TCAD
Task-level services
3.3.1 Task Control Layer
TCAD frameworks
1.1.3 TCAD: Technology Computer
Technology CAD
1.1.3 TCAD: Technology Computer
Temporary data
8.5 EVI: Evaluation Instances
Threshold voltage
9.2.1 Threshold Voltage Reduction
TIF format
4.3.2 Native Tool Formats
Tool agents
5.6.1 Mapping
Tool application
4.1.3 Tools and Tool
Tool application layer
3.3.3 Tool Binding
Treatment
5 Semiconductor Process Flow
Triangle
4.3.4 Gridding
gridding parameters
4.3.4 Gridding
Variational design
8.1 Design Parameterization and
Variational masks
5.11.1 Variational Masks
VISTA
1.2.1 The VISTA Project
VLISP
3.6 Implementation of VISTA/SFC | A LISPXLISP, and
VLISP" interpreter
3.3.1 Task Control Layer
VOS - Vienna Operating System
3.6 Implementation of VISTA/SFC
VUI - Vienna User Interface
3.6 Implementation of VISTA/SFC
Wafer state model
4.3.1 PIF: Profile Interchange
Wafer state" model
4.3 Data Level
World Wide Web
10.5.5 Internet Collaboration and
XLISP
A LISPXLISP, and
Yield
5.1 Fabrication Process Steps



Christoph Pichler
Thu Mar 13 14:30:47 MET 1997