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5.4 Process Flow Representations

Throughout the semiconductor industry, process flow representations (PFR) of various formats are being used to capture, communicate, and store technology data. Unfortunately, these protocols are not shared across different companies, as a lot of implicit information is required to actually translate a design given as process flow and mask data to silicon. These hidden data include silent agreements on proprietary procedures , recipes , and etchants, as well as detailed knowledge of the fabrication equipment available in a particular fab.





Christoph Pichler
Thu Mar 13 14:30:47 MET 1997