B7. Error Function

The lateral doping profile of a diffusion step starting from a constant surface concentration can be calculated by

$$c(x,t) = c_0 \cdot \mathop{\rm erfc}\nolimits \left ( \frac{x}{2 \sqrt{D \cdot t}} \right )$$ (B17)

with

$$\mathop{\rm erfc}\nolimits (z) = 1 - \frac{2}{\sqrt{\pi}} \i... ...a \cdot \delta} \ d\delta = 1 - \mathop{\rm erf}\nolimits (z)$$ (B18)

where $\mathop{\rm erfc}\nolimits$ is the complementary error function $\mathop{\rm erf}\nolimits$ [12].