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7.1.4 Surface Propagation

For the surface propagation according to the deposition rates resulting from the previously described FEM calculations a rate dependent isotropic model for the cell-based topography simulator was used.

In contrast to the low-pressure model from the previous chapter the deposition rates for the high-pressure model are not calculated internally within the topography simulator but read from the external AMIGOS result file. The file contains the vertices of the triangles generated with the surface extraction from Section 7.1.1 and an additional rate value for each vertex resulting from the diffusion/reaction FEM calculation. The rate values of the triangle vertices which are located in the center of the exposed faces of the surface cells are directly assigned as deposition rates to the corresponding surface cells. Due to the coarsening applied in the surface extraction the triangles are in general much bigger than the cube surfaces of the cellular surface representation (cf. Fig. 7.2) and not all surface cells find a corresponding rate value at a vertex of the triangulated surface. Therefore the rate of these cells is assigned by a linear interpolation of the deposition rates at the triangle vertices.

Prev: 7.1.3 Diffusion and Reaction