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Not only from the technical-scientific point of view, but also as a milestone
in my life, this thesis for sure is not the end of the road or the safe
harbor. More probably it is only one of the numerous forkings with many
signposts. Undoubtedly, they point into widely spread directions and on some of
the signs I hardly can decipher the inscription. Neither do I know about the
distance to the locations they indicate nor does one of the signs say ``Easy
way''. But of one thing I'm absolutely sure, regardless which might be the
obstacles lying on the different paths: I can keep my direction, all signs
clearly point forward.
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W. Pyka: Feature Scale Modeling for Etching and
Deposition Processes in Semiconductor Manufacturing