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2.1 The History of Electromigration
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Dissertation M. Rovitto
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1.5 Outline of the Thesis
2.
Physical Description of Electromigration
Subsections
2.1
The History of Electromigration
2.1.1
1960s: Black's Equation
2.1.2
1970s: Blech Effect
2.1.3
1980s: Modification of Black's Equation
2.1.4
From 1990s to Modern Times
2.2
Electromigration Driving Force
2.3
Electromigration Induced Vacancy Transport
2.4
Effect of Diffusion Paths
2.5
Stress Build-up due to Electromigration
2.5.1
Kirchheim Back Stress
2.5.2
Korhonen's Model
2.5.3
Mechanical Constitutive Equations
2.6
Void Initiation Condition
2.7
Void Evolution
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2.1 The History of Electromigration
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Dissertation M. Rovitto
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1.5 Outline of the Thesis
M. Rovitto: Electromigration Reliability Issue in Interconnects for Three-Dimensional Integration Technologies