In general, in addition to the influence of the electromigration induced strain, the total strain ε of the line has contributions from the thermal strain εth and the elastic strain εσ [20]. Thus, the total strain is given by
A temperature change of ΔT, with respect to a reference temperature T0 for which thermal strains are assumed to be zero, produces a thermal strain expressed in the form
\[\begin{equation} \epsilon^\text{th}_\text{ik} =\alpha_\text{th}\Delta T\delta_\text{ik}, \end{equation}\] | (3.60) |
where αth is the coefficient of thermal expansion. Assuming that the metal line is linearly elastic and isotropic, the mechanical behavior of the material is described by a constitutive equation, which relates the stress to an imposed history of strain and other sources which cause inelastic strains, such as material transport due to electromigration and temperature [161]. Hooke's law applies to elastic strains, so that
\[\begin{equation} \sigma_\text{ik}=C_\text{iklm}\epsilon^\sigma_\text{lm}=C_\text{iklm}(\epsilon_\text{lm}-\epsilon^\text{th}_\text{lm}-\epsilon^\text{v}_\text{lm}), \end{equation}\] | (3.61) |
where Ciklm are the components of the stiffness tensor defined by
\[\begin{equation} C_\text{iklm}=\lambda\delta_\text{ik}\delta_\text{lm}+\mu(\delta_\text{il}\delta_\text{km}+\delta_\text{im}\delta_\text{kl}), \end{equation}\] | (3.62) |
where λ and μ are the Lame parameters expressed in terms of the Young's modulus E and the Poisson ratio ν using
\[\begin{equation} \lambda=\cfrac{\nu \text{E}}{(1+\nu)(1-2\nu)}, \enspace \mu=\cfrac{\text{E}}{2(1+\nu)}. \end{equation}\] | (3.63) |
For linear isotropic materials, the stress-strain relation simplifies to
In matrix notation, Hooke's law for isotropic materials can be written as
where τik are the shear stresses, τik=εik+εki=2εik (i≠k) are the "engineering" shear strains, and B is the bulk modulus expressed in the form