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The result of an optimization will strongly depend on the emphasis
that has been layed on individual device categories and their
characteristic properties. As an example, a process which produces
devices for analog signal processing will lay more emphasis on passive
devices like integrated resistors and capacitors.
Figure 2.8 shows the design space where an optimum location
has to be found. Each of the dimensions represents a clear design
strategy; either Design for Manufacturability (DFM), Design for
Performance (DFP), or Design for Reliability (DFR). If we quantify
quality in terms of performance, reliability, and manufacturability
with measures qP, qR, and qM, respectively, and assign
them specific weights (wP,wR,wM), one recognizes that
the closer a point is to the origin as described by
the higher is the total quality qtot of the process which
exhibits the corresponding characteristics. The origin represents the
ultimate process, since it exhibits optimal properties in terms of
DFM, DFP, and DFR. At the same time each point of this space
represents a compromise between DFM, DFR, and DFP for the target
process.
Next: 2.5 Calibration of Models
Up: 2.4 Process Optimization
Previous: 2.4.0.4 Reliability
Rudi Strasser
1999-05-27