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3.3 Stress-Strain Relation

Within the elastic limit of a material Hooke's law is a good approximation for relating stress and strain The generalization of Hook's law for three-dimensional elastic bodies leads to

$\displaystyle \sigma_{ij}=C_{ijkl}\,\varepsilon_{kl}\quad.$ (3.10)

The elastic stiffness tensor $ C_{ijkl}$ is of fourth order and contains $ 81$ ($ 3^{4}$) elements. Introducing additional symmetry considerations, the number of needed components can be reduced [162]. Cubic semiconductors like $ Si$, $ Ge$ or $ G\!aAs$are characterized by only three constants ( $ c_{11}, c_{12}, \mathrm{and}\: c_{44}$).

$\displaystyle \left(\begin{array}{c} \sigma_{xx}\\ \sigma_{yy}\\ \sigma_{zz} \\...
...\ \varepsilon_{zz}\\ \gamma_{yz}\\ \gamma_{xz}\\ \gamma_{xy} \end{array}\right)$ (3.11)

If the strain, instead of stress, is the quantity of interest, it can be calculated by inversion of the elastic stiffness tensor (3.10)

$\displaystyle \varepsilon_{ij}=S_{ijkl}\, \sigma_{kl}\quad,$ (3.12)

or in matrix form

$\displaystyle \left(\begin{array}{c} \varepsilon_{xx}\\ \varepsilon_{yy}\\ \var...
...y}\\ \sigma_{zz} \\ \sigma_{yz}\\ \sigma_{xz} \\ \sigma_{xy} \end{array}\right)$ (3.13)

The stiffness constants are normally denoted as $ c_{ij}$, while the compliance constants are named as $ s_{ij}$. The compliance constants can be calculated from the stiffness constants with the following relations:

\begin{displaymath}\begin{array}{cc} s_{11}=&\frac{c_{11}+c_{12}}{c_{11}^{2}+c_{...
...\quad,\mathrm{and}\\ s_{44}=&\frac{1}{c_{44}}\quad. \end{array}\end{displaymath} (3.14)


next up previous contents
Next: 3.4 Miller Index Notation Up: 3. Strain and Semiconductor Previous: 3.2 Stress

T. Windbacher: Engineering Gate Stacks for Field-Effect Transistors