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Within the elastic limit of a material Hooke's law is a good approximation for relating stress and strain
The generalization of Hook's law for three-dimensional elastic bodies leads to
|
(3.10) |
The elastic stiffness tensor is of fourth order and contains () elements. Introducing additional symmetry considerations, the number of needed components can be reduced [162]. Cubic semiconductors like , or are characterized by only three constants (
).
|
(3.11) |
If the strain, instead of stress, is the quantity of interest, it can be calculated by inversion of the elastic stiffness tensor (3.10)
|
(3.12) |
or in matrix form
|
(3.13) |
The stiffness constants are normally denoted as , while the compliance constants are named as . The compliance constants can be calculated from the stiffness constants with the following relations:
|
(3.14) |
Next: 3.4 Miller Index Notation
Up: 3. Strain and Semiconductor
Previous: 3.2 Stress
T. Windbacher: Engineering Gate Stacks for Field-Effect Transistors