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3.4 Miller Index Notation

The position of a crystal plane is determined by three independent non-collinear points. If these points reside on independent crystal axes, the plane can be characterized in units of the axes. However, it is more convenient to describe the planes location via Miller indices [164,162]. The Miller indices are a triplet of integer values $ (hkl)$, which denote the ratio between the points that intercept the plane and the chosen crystal axes. The Miller indices can be found as follows:

Negative indices are denoted by a bar above their value $ \bar{3}$ or $ \bar{h}$. If there is no interception between an axis and the plane, the Miller index is 0 (they intercept in infinity). Depending on the brackets used, their meaning can be further distinguished:

$ \left(210\right)$ means that the plane intersects the axis vectors at $ \frac{1}{2} \vec{a}_{1}$ and at $ \vec{a}_{2}$. Additionally, the direction vector $ \left[hkl\right]$ is always perpendicular to the plane $ \left(hkl\right)$, for cubic crystal structures.


next up previous contents
Next: 3.5 Strain and Bulk Up: 3. Strain and Semiconductor Previous: 3.3 Stress-Strain Relation

T. Windbacher: Engineering Gate Stacks for Field-Effect Transistors