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In this section possible surface modifications for a BioFET are demonstrated. Several examples regarding BioFETs functionalization with single stranded DNA, utilizing the different models outlined in Section 6.2, followed by a second BioFET functionalized for a biotin-streptavidin reaction, using a SGFET with different dielectric materials is discussed.
Subsections
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Up: 6. Generalization of the
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T. Windbacher: Engineering Gate Stacks for Field-Effect Transistors