| AC | ... | Alternating Current |
| API | ... | Application Programming Interface |
| ASCII | ... | American Standard Code for Information Interchange |
| BCA | ... | Binary Collision Approximation |
| CM | ... | Center of Mass |
| CMOS | ... | Complementary MOS |
| CMP | ... | Chemical Mechanical Polishing |
| CPU | ... | Central Processing Unit |
| CVD | ... | Chemical Vapor Deposition |
| DC | ... | Direct Current |
| DFT | ... | Density Functional Theory |
| DIBL | ... | Drain-Induced Barrier Lowering |
| EOT | ... | Equivalent Oxide Thickness |
| FCC | ... | Face-Centered Cubic |
| Ge-on-Si | ... | Germanium on Silicon |
| GIDL | ... | Gate-Induced Drain Leakage |
| HCI | ... | Hot Carrier Injection |
| IBM | ... | International Business Machines Inc. |
| IC | ... | Integrated Circuit |
| IRW | ... | Integrated Reliability Workshop |
| IT | ... | Information Technology |
| ITRS | ... | International Technology Roadmap for Semiconductors |
| LAT | ... | Large Angle Tilt |
| LDD | ... | Lightly Doped Drain |
| MOS | ... | Metal Oxide Semiconductor |
| MOSFET | ... | MOS Field-Effect Transistor |
| MPI | ... | Message Passing Interface |
| n-MOS | ... | n-Channel MOS Transistor |
| NAND | ... | Not AND |
| NBT | ... | Negative Bias Temperature |
| NBTI | ... | Negative Bias Temperature Instability |
| NIR | ... | Near Infrared |
| OpenMP | ... | Open Multi Processing |
| PC | ... | Personal Computer |
| p-MOS | ... | p-Channel MOS Transistor |
| PhD | ... | Doctor of Philosophy |
| PVD | ... | Physical vapor deposition |
| R-D | ... | Reaction-Diffusion |
| RTA | ... | Rapid Thermal Annealing |
| SiGe | ... | Silicon-Germanium |
| SoC | ... | System on a Chip |
| SILC | ... | Stress-Induced Leakage Current |
| SIMS | ... | Secondary Ion Mass Spectrometry |
| SIMOX | ... | Separation by Implantation of Oxygen |
| SNM | ... | Static Noise Margin |
| SOI | ... | Silicon on Insulator |
| SRAM | ... | Static Random-Access Memory |
| STI | ... | Shallow Trench Isolation |
| TCAD | ... | Technology Computer-Aided Design |
| ULSI | ... | Ultra Large Scale Integration |
| WSS | ... | Wafer State Server |
| ZBL | ... | Ziegler Biersack Littmark |