List of Publications

1. L. Filipovic and S. Selberherr.
   Electric field based simulations of local oxidation nanolithography using atomic force microscopy in a level set environment.
   In Proceedings of the International Symposium on Microelectronics Technology and Devices (SBMicro), pages 265-272, Brasilia, Brazil, 2012.

   
   

2. L. Filipovic and S. Selberherr.
   Simulations of local oxidation nanolithography by AFM based on the generated electric field.
   In International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pages 189-192, Denver, CO, USA, 2012.

   
   

3. L. Filipovic and S. Selberherr.
   Simulation of silicon nanopatterning using nc-AFM.
   In International Conference on non-contact Atomic Force Microscopy, page 108, Cesky Krumlov, Czech Republic, 2012.

   
   

4. J. Weinbub, K. Rupp, L. Filipovic, A. Makarov, and S. Selberherr.
   Towards a free open source process and device simulation framework.
   In 15th International Workshop on Computational Electronics (IWCE), pages 1-4, Madison, USA, 2012.

   
   

5. L. Filipovic and S. Selberherr.
   A two-dimensional Lorentzian distribution for an Atomic Force Microscopy simulator.
   In K. K. Sabelfeld and I. Dimov, editors, Monte Carlo Methods and Applications, DeGruyter Proceedings in Mathematics, pages 97-104. Walter de Gruyter, 2012.

   
   

6. L. Filipovic and S. Selberherr.
   A Monte Carlo simulator for non-contact mode atomic force microscopy.
   In I. Lirkov, S. Margenov, and J. Wasniewski, editors, Large-Scale Scientific Computing, volume 7116 of Lecture Notes in Computer Science, pages 447-454. Springer Berlin Heidelberg, 2012.

   
   

7. L. Filipovic and S. Selberherr.
   A level set simulator for nanooxidation using non-contact atomic force microscopy.
   In International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pages 307-310, Osaka, Japan, 2011.

   
   

8. L. Filipovic and S. Selberherr.
   A two-dimensional Lorentzian distribution for an atomic force microscopy simulator.
   In Abstracts IMACS Seminar on Monte Carlo Methods (MCM), page 30, Borovets, Bulgaria, 2011.

   
   

9. L. Filipovic and S. Selberherr.
   A Monte Carlo simulator for non-contact mode atomic force microscopy.
   In International Conference on Large-Scale Scientific Computations (LSSC), pages 42-43, Sozopol, Bulgaria, 2011.

   
   

10. L. Filipovic, H. Ceric, J. Cervenka, and S. Selberherr.
    A simulator for local anodic oxidation of silicon surfaces.
    In 24th Canadian Conference on Electrical and Computer Engineering, pages 695-698, Niagara Falls, Canada, 2011.

    
    

11. L. Filipovic, O. Ertl, and S. Selberherr.
    Parallelization strategy for hierarchical run length encoded data structures.
    In Proceeding of Parallel and Distributed Computing and Networks, pages 131-138, Innsbruck, Austria, 2011.

    
    

12. O. Ertl, L. Filipovic and, and S. Selberherr.
    Three-dimensional simulation of focused ion beam processing using the level set method.
    In International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pages 49-52, Bologna, Italy, 2010.

    
    

13. L. Filipovic and L. MacEachern.
    A 10-bit low-power SAR ADC with a tunable series attenuation capacitor.
    In International Conference on Microelectronics (ICM), pages 399-402, Sharjah, UAE, 2008.