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3.4 The Energy Barrier

For the calculation of the transmission coefficient it is necessary to take the shape of the energy barrier into account. Electrons tunnel from a semiconductor or metal segment through a dielectric layer to another semiconductor or metal segment. Thus, the band diagram of a metal-oxide-semiconductor (MOS) capacitor has to be investigated. Furthermore, the image force, which leads to a reduction of both the electron and hole energy barrier for thin dielectrics, will be described in this section.


Subsections


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A. Gehring: Simulation of Tunneling in Semiconductor Devices