FOR A RIGOROUS STUDY of tunneling effects in modern semiconductor devices it is mandatory to consider arbitrary device geometries, which is only possible using a general-purpose device simulator. This chapter describes the implementation of the outlined tunneling models into the device simulator MINIMOS-NT. First, a brief description of MINIMOS-NT is given. Then, the discretization of the tunneling current density in dielectrics is described, covering tunneling through single segments and stacked segments and followed by the trap-assisted tunneling interface. Finally, the developed closed- and open-boundary SCHRÖDINGER solver is briefly explained.
A. Gehring: Simulation of Tunneling in Semiconductor Devices