The probably most widespread measurement technique when investigating BTI issues is the so-called Measurement-Stress-Measurement (MSM) method. In the most simple way the transistor is first characterized through static -measurements to obtain a reference of the threshold voltage. (Other ways to extract the onset of the threshold region are listed in [16].) Then is set to for some specified time, referred to as the stress time . After the end of stress the device is once again characterized and the amount of degradation is estimated by the difference with respect to the initial characteristic. The MSM-method can be performed by either monitoring and a subsequent conversion into a -shift or by directly monitoring .