List of Abbreviations

CAD 		 Computer-Aided Design


CMOS 		 Complimentary Metal Oxide Semiconductor


CMP 		 Chemical Mechanical Polishing


CVD 		 Chemical Vapor Deposition


ECAD 		 Electronic Computer-Aided Design


EPL 		 Electron Projection Lithography


EUV 		 Extreme Ultraviolet Lithography


IC 		 Integrated Circuit


IPL 		 Ion Projection Lithography


LATID 		 Large Tilt Angle Implanted Drain


LATIPS 		 Large Tilt Angle Implanted Punchthrough Stopper


LOCOS 		 Local Oxidation of Silicon


LPCVD 		 Low Pressure Chemical Vapor Deposition


MOS 		 Metal Oxide Semiconductor


MOSFET 		 Metal Oxide Semiconductor Field Effect Transistor


NRS 		 Numerical Range Scaling


NMOS 		 N-Channel Metal Oxide Semiconductor


PBL 		 Poly Buffered Local Oxidation of Silicon


PMOS 		 P-Channel Metal Oxide Semiconductor


PVD 		 Physical Vapor Deposition


RTA 		 Rapid Thermal Annealing


SIMOX 		 Seperation by Implanted Oxygen


SIMS 		 Secondary Ion Mass Spectrometry


SOI 		 Silicon on Insulator


STI 		 Shallow Trench Isolation


TCAD 		 Technology Computer-Aided Design


TED 		 Transient Enhanced Diffusion


ULSI 		 Ultra Large Scale Integration


VLSI 		 Very Large Scale Integration


XRL 		 X-ray Lithography


WWW 		 World Wide Web