D Supplementary Material 4

(a) Wall, AR=25, \( s_w=0.2 \), \( \alpha =0.286 \)

   

(b) Bottom, AR=25, \( s_w=0.2 \), \( \alpha =0.286 \)


(c) Wall, AR=25, \( s_w=0.01 \), \( \alpha =0.286 \)

   

(d) Bottom, AR=25, \( s_w=0.01 \), \( \alpha =0.286 \)

Figure D.1: Normalized flux distributions along the wall and at the bottom of a hole and a trench of AR=25: (a) (b): Sticking probability \( s_w=0.2 \). (c) (d) Sticking probability \( s_w=0.01 \). The geometry of the structures is varied according to Figure 7.5b- 7.5e. Lines represent the results of the reference ray tracing simulator ViennaTS. The deviations between ray tracing and radiosity towards the wall-bottom interface are due to the limited grid resolution of the ray tracing simulator. The flux distributions at the bottom span the interval [0.75,0] for the tapered structures and [1.25, 0] for the extended structures.

Bibliography

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Curriculum Vitae

Personal Information
Name Paul Ludwig Manstetten
Address Pezzlgasse 14/8A
1170 Wien
Phone +43 660 740 1624
Email paul@remans.de
Date of Birth September 17, 1984, Berlin
Nationality German
Education
10/2015 - present

Doctoral Program, Electrical Engineering,
Institute for Microelectronics,
Technische Universität (TU) Wien

10/2010 - 09/2012

Graduate Studies, Computational Engineering,
Friedrich-Alexander Universität (FAU) Erlangen-Nürnberg, Faculty of Engineering

10/2005 - 03/2010

Graduate Studies, Mechatronics,
Fachhochschule (FH) Regensburg, Faculty of Electrical Engineering and Information Technology

Research Positions
09/2015 - present

Project Assistant, Christian Doppler Laboratory for High Performance TCAD,
Institute for Microelectronics, TU Wien

05/2012 - 09/2012

Research Assistant, Department of Computer Science 10, FAU Erlangen-Nürnberg

02/2012 - 05/2012

Research Assistant, Chair of Sensor Technology, FAU Erlangen-Nürnberg

10/2009 - 03/2010

Research Assistant, LaS3, FH Regensburg

Industry Positions
11/2012 - 09/2015

Application Engineer for Optical Simulations, OSRAM Opto Semiconductors GmbH, Regensburg

03/2008 - 07/2008

Intern (Advanced Development Group), Continental Automotive GmbH, Regensburg

10/2006 - 02/2007

Intern (Technical Lab), BMW AG, Regensburg

06/2005 - 08/2005

Intern, Infineon AG, Regensburg