Next: 4.5.3 Device Simulation Results
Up: 4.5 Simulation of Polysilicon
Previous: 4.5.1 Device Fabrication
In order obtain results of practical use appropriate process simulation
followed by device simulation and device optimization need to be performed. The
process simulation is straightforward and good results can be obtained using
e.g. TSUPREM [209] or DIOS [210]. The
device structure and net doping profile are shown in Fig. 4.41. The
simulation domain covers only one half of the real device, because of the
symmetric device structure.
Figure 4.41:
Device structure and net doping profile (absolute value)
|
Figure 4.42:
Electron current density at V
= 1.5 V
|
Vassil Palankovski
2001-02-28